fig7
Figure 7. Data reconstruction of a ZrN/Sc0.99Mg0.01N metal/semiconductor multilayer sample. (A) Three-dimensional ion maps of Mg, Sc, and Zr. For clarity, only 3% of atoms of the latter two elements are shown; (B) A 5-nm ‘slice’ of data showing Sc and Zr, taken from the middle of (A), showing the multilayer structure of this sample. The arrows indicate the location of pipe diffusion through a dislocation.
