fig5

Improved atom probe specimen preparation by focused ion beam with the aid of multi-dimensional specimen control

Figure 5. Data reconstruction of an embedded nanowire sample. (A) Desorption map highlighting the nanowire/Al capping layer interface area; (B) reconstructed 3D tomography of nanowire; (C) Atomic concentration 1D profile across the nanowire/Al capping layer interface. 3D: Three-dimensional; 1D: One-dimensional.

Microstructures
ISSN 2770-2995 (Online)

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