fig4

Improved atom probe specimen preparation by focused ion beam with the aid of multi-dimensional specimen control

Figure 4. (A) Schematic of a lift-out bar with encapsulated nanowires; (B) Schematic showing the attachment between lifted-out wedge (after 180° rotation of manipulator) and the pre-sharpened post (with a tilt angle of 12° into the paper); (C) The attached tip from the viewing direction indicated in (B); (D) The orientation of the attached tip after the post tilt was normalized; (E) SEM top view image of APT tip, showing nanowire cross-section; (F) The final tip ready for APT measurement after annular milling. The inset shows the geometry of the specimen with half nanowire and half Al capping layer. APT: Atom probe tomography; SEM: Scanning electron microscope.

Microstructures
ISSN 2770-2995 (Online)

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