fig3

Figure 3. (A) Low magnification morphology image of grown TiN/HZO/TiN thin films, which have the incoherent interface; The inset is the high-magnification HAADF-STEM image of grown TiN/HZO/TiN thin films, which have the obvious stepped structure incoherent interface; (B) and (D) are enlarged images on the left and right sides of the interface in (A), respectively. (C) and (E) are FFT of (B) and (D), respectively. HZO: Hf_0.5Zr_0.5O₂; HAADF-STEM: high-angle-annular-dark-field scanning transmission electron microscopy; FFT: fast Fourier transform.