fig1

Figure 1. (A) Low magnification morphology image of grown TiN/HZO/TiN thin films; (B) The TiN/HZO/TiN thin film in a grain; (C) GPA performed in (B); (D) The strain profile corresponding to the blue line in (C). The black arrows represent the interface; the red arrows indicate the transition region; (E) High-resolution image of the upper half of the grain in (A); (F) High-resolution image of the lower half of the grain in (A). The area indicated by the white dashed line is the transition layer. HZO: Hf_0.5Zr_0.5O₂; GPA: geometric phase analysis.