fig5

Figure 5. (A) Flux-grown method, typical SEM image of flux-grown MoO₂ flake and HAADF image of MoO₂ flake viewed along [201] zone axis. (B) UV-ozone oxidation of wafer-scale MoS₂. Under the UV light, ambient oxygen converts into ozone (ozone generation) and the generated ozone reverts (ozone decomposition) to ambient oxygen. Atomic oxygen is produced during ozone generation and decomposition, which reacts with MoS₂ and converts it to MoO₃. Two-inch sapphire wafer with MOCVD grown monolayer MoS₂ (C) before and (D) after 30 min of UV-ozone oxidation at 120 °C. The 2D MoS₂ converts into a transparent film after oxidation. (A) reprinted with permission^[36],2024, CC BY license. (B-D) reprinted with permission^[42].Copyright 2022, American Chemical Society.