fig4
From: In situ study of phase transition in HZO ferroelectric thin films via TEM electron beam irradiation
Figure 4. (A-G) HRTEM images of the HZO ferroelectric thin film during electron beam irradiation and the GPA analysis results of the corresponding red box area, scale bar 5 nm. (H) Schematic diagram of electron beam irradiation-induced ferroelectric phase transition in HZO thin film.
