fig3
From: In situ study of phase transition in HZO ferroelectric thin films via TEM electron beam irradiation
Figure 3. (A) HRTEM image of the HZO ferroelectric thin film before electron beam irradiation, scale bar 5 nm. (B) Magnified image of the m-phase in the red box area, scale bar 2 nm. (C) FFT image of the red box area, (D) HRTEM image of the HZO ferroelectric thin film after electron beam irradiation, scale bar 5 nm. (E) Magnified image of the o-phase in the green box area, scale bar 2 nm. (F) FFT image of the green box area.
