fig1

High-throughput screening of superlattice-like Ge-Sb-M (M = Sn, Se) thin films for multi-level phase change photonics materials

Figure 1. Schematics diagram of Ge-Sb-Sn and Ge-Sb-Se combinatorial SLL thin films. (A) High-throughput deposition process using a movable mask (for generating gradient component distribution) and a triangle-shape mask; (B) Cross section of the thin films with distinct coating sequences (Ge→Sb→Sn/Se and Sb→Sn/Se→Ge).

Microstructures
ISSN 2770-2995 (Online)

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