fig1

Figure 1. Schematics diagram of Ge-Sb-Sn and Ge-Sb-Se combinatorial SLL thin films. (A) High-throughput deposition process using a movable mask (for generating gradient component distribution) and a triangle-shape mask; (B) Cross section of the thin films with distinct coating sequences (Ge→Sb→Sn/Se and Sb→Sn/Se→Ge).