fig1

From: Grain engineering of high energy density BaTiO₃ thick films integrated on Si

Grain engineering of high energy density BaTiO<sub>3</sub> thick films integrated on Si

Figure 1. XRD θ-2θ scan patterns of the thin film heterostructures of (A) BaTiO₃/Pt/Ti/Si (with various thicknesses of the BaTiO₃ layer) and (B) BaTiO₃/LaNiO₃/Pt/Ti/Si (with a 510 nm thick BaTiO₃ layer).

Microstructures

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