fig5
![Design and manufacture of high-performance microbatteries: lithium and beyond](https://image.oaes.cc/1cfd7131-bfda-4d33-80ac-ee961edb8cc8/4905.fig.5.jpg)
Figure 5. Brief development timeline of representative 3D MBs. Proposal of 3D interdigital structure (reproduced with permission[59]. Copyright 2008, Wiley-VCH). 3D interdigital LIB from 3D printing (reproduced with permission[61]. Copyright 2013, Wiley-VCH). 3D interdigital MB with conformal solid electrolyte (reproduced with permission[26]. Copyright 2018, Elsevier). Spiral 3D interpenetrated MB (reproduced with permission[73]. Copyright 2018, Royal Society of Chemistry). 3D interlocking MB (reproduced with permission[76]. Copyright 2018, Wiley-VCH). 3D LIB based on a serpentine configuration (reproduced with permission[83]. Copyright 2020, Elsevier). 3D interdigital LIB with gel polymer electrolyte (reproduced with permission[70]. Copyright 2021, Wiley-VCH). MBs: Microbatteries; LIB: lithium-ion battery.