fig15
![Microstructural evolution and ferroelectricity in HfO<sub>2 </sub>films](https://image.oaes.cc/acb286e2-3aef-4c4b-b87e-31f17f58d8a1/4637.fig.15.jpg)
Figure 15. (A) Possible phase transformation paths from the T-phase to the O-phase. (B) Crystal parameter matching between HfO2 films and electrodes/substrates[162].
Figure 15. (A) Possible phase transformation paths from the T-phase to the O-phase. (B) Crystal parameter matching between HfO2 films and electrodes/substrates[162].
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