fig3

Figure 3. Schematic diagrams of temperature sensors, pressure sensors, and multifunctional sensors. (A) Layer-by-layer description of a Pt-based flexible 3 × 3 array temperature sensor. Reproduced with permission^[58]. Copyright 2024, Materials Today Nano; (B) Flexible micro-3D thin-film sensor for temperature measurement. Reproduced with permission^[60]. Copyright 2021, Microsystems & Nanoengineering; (C) Robust flexible pressure sensors made from conductive micropyramids. Reproduced with permission^[61]. Copyright 2020, ACS Nano; (D) Structure of the TCTS array. Reproduced with permission^[64]. Copyright 2024, ACS Nano; (E) Schematic diagram of a flexible capacitive pressure sensor based on electrospun PI nanofiber membrane. Reproduced with permission^[68]; (F) Schematic illustration of the fully printed trimodal (Proximity-pressure-temperature) sensor sheet. Reproduced with permission^[71]. Copyright 2021, Advanced Materials Technologies; (G) The left expanded view of the multilayered construction of an entire 3DAE-Skin device. The right expanded view of a representative functional unit. Reproduced with permission^[73]. Copyright 2024, Science. 3D: Three-dimensional; TCTS: triboelectric capacitive-coupled tactile sensor; PI: polyimide.