fig3

Figure 3. Fabrication processes of the sensor. (A) Schematic illustrations of the fabrication process of DTTS; (B) Photographic and (C) optical microscopic images of the laser-patterned AgNWs coil - the left, upper middle, and right images are top views of the fabricated AgNW coil patterns; the lower middle image is the cross-sectional view of a fabricated AgNW coil pattern. The laser-cutting width of around 40 µm by a single laser scan is marked in between dashed guidelines for cutting boundaries. For the AgNW coil patterns of large interspacing, multiple offset laser scribing paths are used to achieve electrical isolation with a minimal processing load, typically resulting in grid-like patterns in the left image in (C). DTTS: Dual tri-axial tactile sensors; PDMS: polydimethylsiloxane; AgNWs: silver nanowires.