fig2

Micro-cylindrical/fibric electronic devices: materials, fabrication, health and environmental monitoring

Figure 2. Photolithography-based fabrication methods on micro-cylindrical surfaces. (A) Cylindrical direct projection lithography. Reproduced with permission[40]. Copyright 2018, MDPI; (B) Variable-width slit mask-assisted lithography[78]. Copyright 2015, SPST; (C) Chromium-coated polymer flexible mask-assisted lithography. Reproduced with permission[79]. Copyright 2020, IOP Publishing Ltd; (D) Combination of flexible SU-8 photolithographic mask and planar slit mask lithography. Reproduced with permission[80]. Copyright 2011, Elsevier; (E) Mask-less lithography using high-resolution light beams. Reproduced with permission[19]. Copyright 2017, John Wiley and Sons; (F) Programmable improved UV lithography system[81]. Copyright 2013, WORLD SCIENTIFIC PUBL CO PTE LTD. UV: Ultraviolet.

Soft Science
ISSN 2769-5441 (Online)
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