fig7

Figure 7. (A) The structure and sensing mechanism of shear force sensor with TMHAs^[105]; (B) the design concept of multi-contact tactile sensors and mechanism of shear resolution^[106]. UV: Ultraviolet; PVA: polyvinyl alcohol; PET: polyethylene terephthalate; PDMS: polydimethylsiloxane; TMHAs: tilted micro-hair arrays.