fig14
![Development of robust surfaces for harsh service environments from the perspective of phase formation and transformation](https://image.oaes.cc/6fdf97ea-ef8f-4210-ac0b-4962c57383cc/4323.fig.14.jpg)
Figure 14. Calculated phase diagrams of TiSiCN depending on different parameters: (A) temperature and pressure; (B) temperature and mole fraction of SiCl4 (CH3CN). (C) CFD simulated temperature contours in an industrial-scale CVD furnace. Figure reproduced from Refs.[79,81] with permission from Elsevier.